MANUFACTURING ENGINEERING AND TECHNOLOGY

lt gives us great pleasure to acknowledge the assistance of the following colleagues in the preparation and publication of this edition of the book: Komel F. Ehmann, Northwestern University; Klaus J.Weinmann, University of California at Berkeley; Timotius Pasang, AUT University; Miguel Sellés Canto, Escola Politecnica Superior d’Alcoi, Universitat Politécnica de Valencia, Spain; and Kevin Wilson, Michael Giordano and Megan McGann, University of Notre Dame.We also acknowledge Kent M. Kalpakjian as the original author ofthe chapter on Fabrication of Microelectronic Devices. We would like to thank our editor, Holly Stark, at Prentice Hall for her enthusiastic support and guidance; and Clare Romeo, Production Editor, for her meticulous editorial and production supervision. We would also like to acknowledge the help of the following in the production of this edition of the book: Greg Dulles, A/V Project Manager; Daniel Sandin, Media Editor;